Light at 13.5 Nanometers

10 atomic recall cards. Export to Anki and let spaced repetition do its slow work.

In Anki: File → Import, choose this TSV, set field separator to Tab, deck = Sand to Silicon · Ch 08, note type = Basic.

Front	Back
What is the wavelength of EUV light used in semiconductor lithography?	13.5 nanometers.
Which company is the sole manufacturer of EUV scanners?	ASML, based in Veldhoven, the Netherlands.
How much does a single EUV scanner cost?	Roughly $200 million.
How heavy is an EUV scanner?	On the order of 150 metric tons.
How many EUV scanners are in use across the entire planet?	Perhaps 200.
How many tin droplets are vaporized per second to produce EUV light?	50,000 per second.
What temperature does the tin plasma reach?	Over 200,000°C.
What type of laser fires the two pulses that create the EUV plasma?	A CO₂ laser — a pre-pulse to flatten the droplet, then a main pulse to vaporize it.
How many alternating bilayers make up an EUV mirror, and of what materials?	About 50 alternating bilayers of molybdenum and silicon.
By what factor does the EUV scanner demagnify the mask image onto the wafer?	4× — the projected image is one-quarter the size of the mask.